1301.6248 (Morten P. Bakker et al.)

Monitoring the formation of oxide apertures in micropillar cavities    [PDF]

Morten P. Bakker, Henk Snijders, Donald J. Suntrup III, Tuan-Ahn Truong, Martin P. van Exter, Dirk Bouwmeester

We present an imaging technique that enables us to monitor the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. Directly after oxidation, we confirm in situ, without any further fabrication steps, that high quality optical modes confined to a small volume are formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxidation apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.

View original: http://arxiv.org/abs/1301.6248